By Simon S. Cohen, Norman G. Einspruch
VLSI Electronics Microstructure technology, quantity thirteen: Metal-Semiconductor Contacts and units provides the physics, expertise, and purposes of metal-semiconductor limitations in electronic built-in circuits. The emphasis is put on the interaction one of the thought, processing, and characterization innovations within the improvement of functional metal-semiconductor contacts and devices.
This quantity comprises chapters which are dedicated to the dialogue of the physics of metal-semiconductor interfaces and its simple phenomena; fabrication systems; and interface characterization options, fairly, ohmic contacts. Contacts that contain polycrystalline silicon; purposes of the metal-semiconductor boundaries in MOS, bipolar, and MESFET electronic built-in circuits; and techniques for measuring the barrier peak are coated as well.
Process engineers, gadget physicists, circuit designers, and scholars of this self-discipline will locate the e-book very invaluable.
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